TY  - CPAPER
AU  - М. А. Барулина
TI  - MATHEMATICAL PROOF WHY CRYSTALLOGRAPHIC PLANE (111) IS BETTER FOR MICROELECTROMECHANICAL SENSORS SENSING ELEMENTS
T2  - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 19th International Multidisciplinary Scientific GeoConference SGEM2019, Nano, Bio, Green and Space: Technologies for Sustainable Future
PY  - 2019
SP  - 229
EP  - 236
DO  - 10.5593/sgem2019/6.1/s24.030
PB  - STEF92 Technology
ER  -