TY - CPAPER AU - Teodor Lucian Grigorie AU - Irinel Constantin Gresita AU - Otilia Grigorie TI - CLOSED-LOOP CONTROLLED ARCHITECTURE OF A MEMS CAPACITIVE ACCELEROMETER WITH EXCITATION BASED ON A HIGH FREQUENCY SQUARE-WAVE VOLTAGE SIGNAL, USED IN INERTIAL NAVIGATION APPLICATIONS T2 - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th International Multidisciplinary Scientific GeoConference Proceedings SGEM 2020, Informatics, Geoinformatics and Remote Sensing PY - 2020 SP - 35 EP - 44 DO - 10.5593/sgem2020/2.2/s09.005 PB - STEF92 Technology ER -