@inproceedings{sgem2020s0704,
  title = {NUMERICAL SIMULATION OF THE PECVD REACTOR FOR THE SOLAR CELLS AND THE GREEN ENERGY},
  author = {Mikhail Lavrentiev and Alexey Snytnikov},
  booktitle = {SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th SGEM International Multidisciplinary Scientific GeoConference Proceedings 2020,},
  year = {2020},
  pages = {27-32},
  publisher = {STEF92 Technology},
  doi = {10.5593/sgem2020v/6.2/s07.04}
}