TY  - CPAPER
AU  - Mikhail Lavrentiev
AU  - Alexey Snytnikov
TI  - NUMERICAL SIMULATION OF THE PECVD REACTOR FOR THE SOLAR CELLS AND THE GREEN ENERGY
T2  - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th SGEM International Multidisciplinary Scientific GeoConference Proceedings 2020,
PY  - 2020
SP  - 27
EP  - 32
DO  - 10.5593/sgem2020v/6.2/s07.04
PB  - STEF92 Technology
ER  -