@inproceedings{sgem2020s24012,
  title = {NUMERICAL ANALYSIS OF KEY FACTORS IN SILICON CARBIDE MANUFACTURING PROCESS},
  author = {M. A. Vartanyan and Mariya Gordienko and Н. А. Макаров},
  booktitle = {SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th International Multidisciplinary Scientific GeoConference Proceedings SGEM 2020, Nano, Bio, Green and Space: Technologies for Sustainable Future},
  year = {2020},
  pages = {85-92},
  publisher = {STEF92 Technology},
  doi = {10.5593/sgem2020/6.1/s24.012}
}