TY  - CPAPER
AU  - M. A. Vartanyan
AU  - Mariya Gordienko
AU  - Н. А. Макаров
TI  - NUMERICAL ANALYSIS OF KEY FACTORS IN SILICON CARBIDE MANUFACTURING PROCESS
T2  - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th International Multidisciplinary Scientific GeoConference Proceedings SGEM 2020, Nano, Bio, Green and Space: Technologies for Sustainable Future
PY  - 2020
SP  - 85
EP  - 92
DO  - 10.5593/sgem2020/6.1/s24.012
PB  - STEF92 Technology
ER  -