TY - CPAPER AU - Gauhar Assilbayeva TI - FEATURES OF TOTAL OPTICAL REFLECTION IN SILICON NANOSTRUCTURES OBTAINED BY METAL ASSISTED CHEMICAL ETCHING T2 - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future PY - 2017 SP - 141 EP - 148 DO - 10.5593/sgem2017/61/s24.019 PB - STEF92 Technology ER -