@inproceedings{sgem2017s24018,
  title = {FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR},
  author = {Sergei Evstafev and Sergey Timoshenkov and Vyacheslav Samoilykov and Natalia Korobova},
  booktitle = {SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future},
  year = {2017},
  pages = {133-140},
  publisher = {STEF92 Technology},
  doi = {10.5593/sgem2017/61/s24.018}
}