TY  - CPAPER
AU  - Sergei Evstafev
AU  - Sergey Timoshenkov
AU  - Vyacheslav Samoilykov
AU  - Natalia Korobova
TI  - FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR
T2  - SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future
PY  - 2017
SP  - 133
EP  - 140
DO  - 10.5593/sgem2017/61/s24.018
PB  - STEF92 Technology
ER  -