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Lavrentiev, Mikhail, Snytnikov, Alexey. NUMERICAL SIMULATION OF THE PECVD REACTOR FOR THE SOLAR CELLS AND THE GREEN ENERGY. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th SGEM International Multidisciplinary Scientific GeoConference Proceedings 2020,, 2020, pp. 27-32. https://doi.org/10.5593/sgem2020v/6.2/s07.04
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Lavrentiev, Mikhail, Snytnikov, Alexey. NUMERICAL SIMULATION OF THE PECVD REACTOR FOR THE SOLAR CELLS AND THE GREEN ENERGY. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th SGEM International Multidisciplinary Scientific GeoConference Proceedings 2020,, 2020, pp. 27-32. https://doi.org/10.5593/sgem2020v/6.2/s07.04