Publication
NUMERICAL SIMULATION OF THE PECVD REACTOR FOR THE SOLAR CELLS AND THE GREEN ENERGY
(STEF92 Technology, 2020-12-20, Mikhail Lavrentiev, Alexey Snytnikov)
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One of the possible ways of transition to the eco-friendly energy is widening the use of the solar cells. It requires the enhancement of their efficiency and the reduction of the cost of manufacture. One of the most common tools for producing silicon films for the solar cells is the Plasma Enhanced Chemical Vapor Deposition (PECVD). The present paper describes a new Particle-In-Cell code for simulation of the PECVD reactor. The goal of the research is the optimization of real PECVD reactor by means of the simulati...
Micro and Nano Technologies2020