NUMERICAL ANALYSIS OF KEY FACTORS IN SILICON CARBIDE MANUFACTURING PROCESS
M. A. Vartanyan, Mariya Gordienko, Н. А. Макаров · SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 20th International Multidisciplinary Scientific GeoConference Proceedings SGEM 2020, Nano, Bio, Green and Space: Technologies for Sustainable Future
