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Title: CLOSED-LOOP CONTROLLED ARCHITECTURE OF A MEMS CAPACITIVE ACCELEROMETER WITH EXCITATION BASED ON A HIGH FREQUENCY SQUARE-WAVE VOLTAGE SIGNAL, USED IN INERTIAL NAVIGATION APPLICATIONS
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CLOSED-LOOP CONTROLLED ARCHITECTURE OF A MEMS CAPACITIVE ACCELEROMETER WITH EXCITATION BASED ON A HIGH FREQUENCY SQUARE-WAVE VOLTAGE SIGNAL, USED IN INERTIAL NAVIGATION APPLICATIONS
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1314-2704
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English
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20
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2.2
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The MEMS technology has experienced an amazing growth since the mid-20th century, becoming a major presence in current technologies. The MEMS devices refers to microstructures that are based on both electrical and mechanical components. Given their multiple applicability, made the demand on market to increase, resulting the rapid development of this technology. With a wide opening in the field of navigation, MEMS devices are based on accelerometers and gyros, but also on sensors such as magnetometers, environmental or pressure sensors, and microphones. An accelerometer is a device that measures proper acceleration due to a sensing element. It is used in various domains such as industrial, automotive, consumer, or military. There are several types of accelerometers, the difference between them being the operating principle: capacitive, piezoelectric, piezo-resistive, Hall Effect, magneto-resistive. The here presented work refers to the development of the closed loop architecture of a capacitive accelerometer in differential configuration, using as excitation signal a higher frequency square wave voltage signal. The mechanism used to close the accelerometer loop is exposed both from the mathematical modeling point of view, but also in terms of numerical simulation. The accelerometer architecture includes a differential capacitive detection circuit with charge amplifier connected to a phase sensitive demodulator able to sense the magnitude and the sense of the acceleration. A control system on the direct path of the accelerometer, following the phase sensitive demodulator, is used to improve its dynamic behavior. To design the control law, a linear model of the accelerometer is used, while the control coefficients are tuned by using various integral criteria. Shown are the mechanism used to close the accelerometer loop, the numerical testing and the analysis of the closed loop accelerometer dynamic performances for all criteria implied in the tuning of the control system coefficients.
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conference
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20th International Multidisciplinary Scientific GeoConference SGEM 2020
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20th International Multidisciplinary Scientific GeoConference SGEM 2020, 18 - 24 August, 2020
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Proceedings Paper
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STEF92 Technology
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International Multidisciplinary Scientific GeoConference-SGEM
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SWS Scholarly Society; Acad Sci Czech Republ; Latvian Acad Sci; Polish Acad Sci; Russian Acad Sci; Serbian Acad Sci & Arts; Natl Acad Sci Ukraine; Natl Acad Sci Armenia; Sci Council Japan; European Acad Sci, Arts & Letters; Acad Fine Arts Zagreb Croatia; C
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35-44
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18 - 24 August, 2020
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website
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cdrom
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7044
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inertial sensors; MEMS; capacitive accelerometer; closed loop; mathematical model; control tuning
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