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М. А. Барулина. MATHEMATICAL PROOF WHY CRYSTALLOGRAPHIC PLANE (111) IS BETTER FOR MICROELECTROMECHANICAL SENSORS SENSING ELEMENTS. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 19th International Multidisciplinary Scientific GeoConference SGEM2019, Nano, Bio, Green and Space: Technologies for Sustainable Future, 2019, pp. 229-236. https://doi.org/10.5593/sgem2019/6.1/s24.030
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М. А. Барулина. MATHEMATICAL PROOF WHY CRYSTALLOGRAPHIC PLANE (111) IS BETTER FOR MICROELECTROMECHANICAL SENSORS SENSING ELEMENTS. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 19th International Multidisciplinary Scientific GeoConference SGEM2019, Nano, Bio, Green and Space: Technologies for Sustainable Future, 2019, pp. 229-236. https://doi.org/10.5593/sgem2019/6.1/s24.030