Scholarly record
MATHEMATICAL PROOF WHY CRYSTALLOGRAPHIC PLANE (111) IS BETTER FOR MICROELECTROMECHANICAL SENSORS SENSING ELEMENTS
Abstract
In this research we have obtained mathematical relations between elastic constants, such as Young's modulus and Poisson's ratio, using single-crystalline silicon as an example. When the obtained relations are fulfilled, the influence of misalignment of the crystallographic directions and the coordinate axes associated with the sensing element of microelectromechanical sensors on the stress-strain state and natural frequencies of sensing element will be minimal. Therefore, the influence of such misalignment on the performance of microelectromechanical sensors will also be minimized. Elastic constants of the most commonly used crystallographic planes in microelectromechanical sensor?s design have been analyzed. It has been shown that the elastic constants of crystallographic plane (111) completely conform to the obtained relations, that makes use of crystallographic plane (111) preferable in terms of minimization of the effects of errors in orientation of coordinate axes relative to the crystal structure.
Publication Impact Profile
- Citations
- Scopus - Citation Indexes: 2
Publication details
References0
Structured references will appear here after the reference import pass. The count is preserved now so the scholarly record is not incomplete.
Citing literature
Number of times cited according to Crossref: 2
View or Download full articleAccess options
SWS access login
Login as SWS Scientific CommitteeLogin as SWS Scientific PartnerLogin as SWS AuthorAuthors and approved SWS contributors will read and export their own linked papers after identity matching by SWS profile, email and SGEM GlobalID.
For librarian assistance: [email protected]
Purchase Instant Access
- Article can be downloaded after successful payment.
- Article may be used according to SWS library access terms.
- Article cannot be redistributed.