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Sergei Evstafev, Sergey Timoshenkov, Vyacheslav Samoilykov, Natalia Korobova. FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future, 2017, pp. 133-140. https://doi.org/10.5593/sgem2017/61/s24.018
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Sergei Evstafev, Sergey Timoshenkov, Vyacheslav Samoilykov, Natalia Korobova. FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR. SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future, 2017, pp. 133-140. https://doi.org/10.5593/sgem2017/61/s24.018