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FABRICATION OF A REFLECTING MEMS-ELEMENT BASED ON A THERMAL MICROMECHANICAL ACTUATOR
Abstract
Based on a previous research, a thermal bimorph actuator was used for a development of a micromirror element. An existing technological process for the manufacturing of IC was used as base for micromirror. An analysis of the available construction materials was made, on the basis of which a choice was made for silicon as the main material for the micromirror, aluminum as the reflective coating and the first element of the bimorph beam, and silicon dioxide as the second element of the bimorph beam. ? polysilicon heater is used for heating. Based on these materials, the design and topology of the micromirror element was created with dimensions of the reflecting surface of 50x50 and 100x100 ?m. The technological manufacturing process of a micromirror includes 7 main stages: preparation of a silicon wafer, oxidation, a creation of a heating element, insulation of a heating element, opening of contact windows, aluminum deposition and final etching of a micromirror element. Of all the operations listed above are usual for an IC fabrication, with the exception of the last one, which is an isotropic plasmachemical etching up to a depth of 30-50 ?m. Using the proposed technological process, test micromirror elements have been manufactured and successfully tested.
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Timoshenkov S. P., Evstafyev S. S., Britkov I. M., Development of controlled micro-mirrors with large rotation angle, Advanced Materials Research, vol. 630, pp 339-343, 2013.
Que L., Park J.S., Gianchandani Y.B., Bent-beam electrothermal actuators-Part I: Single beam and cascaded devices, Journal of Microelectromechanical Systems, issue 2. pp 247-258, 2001.
Comtois J.H., Michalicek M.A., Barron C.C. Characterization of electrothermal actuators in a four-level, planarized surface-micromachined polycrystalline process, Proc. IEEE Int. Conf. on Solid-State Sensors and Actuators (Transducers ’97), Chicago, pp 769-772, 1997.
Kozlov D.V., Smirnov I.P., Zhukov A.A., Shakhnov V.A. Experimental study of power characteristics of the working element of thermal microactuators, Vestnik MSTU. N.E. Bauman, Series "Instrument-Making.", vol. 2, p 84, 2011.
Zhukov A.A., Zakharov A.A., Timoshenkov S.P., Bimorph beam actuator with V-shaped polyamide grooves, Nano and microsystem technique, vol. 7, pp 60-64, 2007.
Prokhorov A.M. Physical encyclopedia. In 5 volumes, 3475 p, 1988.
Ryabukhin A.G., Linear coefficient of thermal expansion of metals, Izvestiya Chelyabinsk Scientific Center, vol 3. p. 15, 1999.
Anuriev V.I., Handbook of the designer-machine builder in 3 volumes. Mechanical Engineering, vol 1, p. 34, 2001.
Kryzhanovskiy V.K., Kerber M.L., Burlov V.V., Manufacture of products from polymeric materials, St. Petersburg: Profession, pp. 465, 2004.
Lide D.R., CRC Handbook of Chemistry and Physics, 90th Edition, CRC Press (Taylor and Francis Group), Boca Raton, FL, pp 2804, 2009.
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