Scholarly record
CLOSED-LOOP CONTROLLED ARCHITECTURE OF A MEMS CAPACITIVE ACCELEROMETER WITH EXCITATION BASED ON A HIGH FREQUENCY SQUARE-WAVE VOLTAGE SIGNAL, USED IN INERTIAL NAVIGATION APPLICATIONS
Abstract
The MEMS technology has experienced an amazing growth since the mid-20th century, becoming a major presence in current technologies. The MEMS devices refers to microstructures that are based on both electrical and mechanical components. Given their multiple applicability, made the demand on market to increase, resulting the rapid development of this technology. With a wide opening in the field of navigation, MEMS devices are based on accelerometers and gyros, but also on sensors such as magnetometers, environmental or pressure sensors, and microphones. An accelerometer is a device that measures proper acceleration due to a sensing element. It is used in various domains such as industrial, automotive, consumer, or military. There are several types of accelerometers, the difference between them being the operating principle: capacitive, piezoelectric, piezo-resistive, Hall Effect, magneto-resistive. The here presented work refers to the development of the closed loop architecture of a capacitive accelerometer in differential configuration, using as excitation signal a higher frequency square wave voltage signal. The mechanism used to close the accelerometer loop is exposed both from the mathematical modeling point of view, but also in terms of numerical simulation. The accelerometer architecture includes a differential capacitive detection circuit with charge amplifier connected to a phase sensitive demodulator able to sense the magnitude and the sense of the acceleration. A control system on the direct path of the accelerometer, following the phase sensitive demodulator, is used to improve its dynamic behavior. To design the control law, a linear model of the accelerometer is used, while the control coefficients are tuned by using various integral criteria. Shown are the mechanism used to close the accelerometer loop, the numerical testing and the analysis of the closed loop accelerometer dynamic performances for all criteria implied in the tuning of the control system coefficients.
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References15
Negrea, P., Grigorie, T.L., Dinca, L., Corcau, J., Modeling and numerical simulation of an open-loop miniature capacitive accelerometer for inertial navigation applications, CEAS 2013, Linköping, Sweden, 16-19 September, 2013, pp. 323-329
Chollet, F. and Liu, H.B. A (not so) short Introduction to Micro Electromechanical Systems, version 5.0, 2012, <<http://mems cyclopedia.org/introMEMS.html>>
PRIME Faraday Partnership, An Introduction to MEMS. Loughborough University, Leics LE11 3TU, 2002
Timmer, W. (Editor), Micromechanics and MEMS: Classic and seminal Papers to 1990. IEEE Press, New York, 1997
Marinis, T., The Future of MEMS. Draper Laboratory, 555 Technology Square, Cambridge, MA 02139, 2007
Allen, J., Micro Electro Mechanical Systems design, CRC Press, Boca Raton, 2005.
Stovall, S., Basic Inertial Navigation. Naval air warfare center weapons division, California, 1997
Andrejasic, M. MEMS accelerometer: seminar, University of Ljubljana, Faculty for mathematics and physics, Department of physics, 2008
Baxter, K., Capacitive sensors: Design and applications. IEEE, New York, 1997
Negrea, P. and Grigorie, T.L. Mathematical modeling and numerical simulation of the detection unit in a miniaturized capacitive accelerometer. 11th International Conference on Applied and Theoretical Electricity – ICATE 2012, Craiova, RO, 2012
Lungu, R. and Grigorie, T.L., Traductoare accelerometrice si girometrice, Sitech Publisher, Craiova, 2005
Grigorie, T.L., The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 1: Open loop. The IEEE 4nd International Conference on Perspective Technologies and Methods in MEMS Design, Polyana, Ukraine, 21 - 24 may, 2008
Kraft, M. Closed-loop accelerometer employing oversampling conversion, Coventry University PhD Thesis, 1997
Negrea, P., Edu, I.R., Grigorie, T.L., A Closed Loop Capacitive Miniaturized Accelerometer, 1st International Conference New Challenges in Aerospace Sciences (NCAS 2013), Bucharest, 7-8 November, 2013, pp. 185-188
Grigorie, T.L., Sandu, D.G., Firanescu, M., Trusca, E., Grigorie, O. Control tuning in a closed loop capacitive MEMS accelerometer, 14th International Multidisciplinary Scientific GeoConference SGEM 2014, Albena, Bulgaria, 17-26 June, 2014
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