Scholarly record
CREATION OF HIERARCHICAL STRUCTURES OF FORMAL DESCRIPTIONS OF MODELS OF THE NANOIMAGES BASED ON GROUPS OF THE SIGNS RELATING TO VARIOUS MORPHOLOGICAL AND LARGE-SCALE LEVELS OF REPRESENTATION
Abstract
The sequence of images received when studying a nanoobject (the induced cluster-type nanostructures) at different scales is offered to consider as result of mutual influence of factors of heredity and variability of signs on some of his initial characteristics. Features of heredity and variability of signs gives the chance of creation of hierarchical structures of formal descriptions are described, i.e. models of the nanoimages based on groups of the signs relating to various morphological and large-scale levels of representation. The new methods of processing and the analysis of images based on these theoretical provisions and approaches have to provide a possibility of fuller extraction of information due to use of multilevel system of signs. Thus, for the most complete analysis of nanostructures, it is necessary to use its images obtained at different scales of observation. In this case, the same feature (feature) can manifest itself in varying degrees on several images of a multiscale sequence, constantly changing at the same time. As a result of such changes, it can either disappear or change so much that it will be next to it as another independent feature (feature). Here it is possible to note the possibility of mutual influence of various features on each other, resulting in the appearance in a multiscale sequence of images with new characteristic properties and features. Buying a nanoobject, i.e. models of images based on various attributes related to different morphological and scale levels of representation. Analysis of these structures allows us to come to a flexible multi-level "top-down" processing system, the use of which is associated not only with the requirement to improve accuracy, but also the need to fundamentally change the perception strategy of nanoobjects, in contrast to macroobjects.
Publication Impact Profile
Publication details
References15
S. Arakelian, S. Kutrovskaya, A. Kucherik, A. Osipov, A. Povolotckaia, A. Povolotskiy, A. ManshinaLaser-induced synthesis of a nanostructured polymer-like metal-carbon complexes//Proc. of SPIE Vol. 9884, 988425 (2016).
Novel method for dimensional measurements of nanorelief elements based onelectron probe defocusing in a scanning electron microscope / M. N. Filippov [et al.] // Measurement Science and Technology. — 2014. — Mar. — Vol. 25, no. 4.
Gavrilenko V. P., Todua P. A. Nanometrology as a key part of the infrastructureof nanotechnology // Nanotechnologies in Russia. — 2013. — May. — Vol. 8, no. 5-6.
Reference material for transmission electron microscope calibration / M. N. Filippov [et al.] // Measurement Science and Technology. — 2011. — Aug. — Vol. 22, no. 9.
Scanning electron microscopy used to measure the feature dimensions of ananoscale test pattern on a silicon surface / V. — P. Gavrilenko [et al.] // Russian Microelectronics. — 2011. — Nov. — Vol. 40, no. 6. — Pp. 436–440.
Novikov Y. A. Backscattered electron imaging of microand nanostructures: 3. Structures with a trapezoidal profile and small side-wall inclination angles // J. Synch. Investig. — 2015. — Sept. — Vol. 9, no. 5. — Pp. 1060–1069.
Novikov Y. A. Imaging of a test object with a trapezoidal profile and large sidewall inclinations in a scanning electron microscope in the backscattered electron mode // J. Synch. Investig. — 2011. — Oct. — Vol. 5, no. 5. — Pp. 917–923.
Kal’nov V. A., Novikov Y. A., Orlikovsky A. A. Operation of an electroniclithograph in the mode of a scanning electron microscope // Russian Microelectronics. — 2012. — Nov. — Vol. 41, no. 6. — Pp. 347–350.
Attota R., Bunday B., Vartanian V. Critical dimension metrology by throughfocus scanning optical microscopy beyond the 22 nm node // Appl. Phys. Lett. — 2013. — Vol. 102, no. 22..
Gerke K. M., Karsanina M. V., Mallants D. Universal Stochastic MultiscaleImage Fusion: An Example Application for Shale Rock // Sci. Rep. — 2015. — Nov. — Vol. 5.
Larionov Y. V., Novikov Y. A. Mechanisms of image formation in SEM // International Conference Micro- and Nano-Electronics 2012 / ed. by A. A. Orlikovsky. — SPIE-Intl Soc Optical Eng, Jan. 2013.
Quantitative Measurement of the Surface Self-Diffusion on Au Nanoparticlesby Aberration-Corrected Transmission Electron Microscopy / A. Surrey [et al.] // Nano Letters. — 2012. — Dec. — Vol. 12, no. 12. — Pp. 6071–6077.
Optical characterization of macro-, micro- and nanostructures using polarizedlight / P. Petrik [et al.] // J. Phys.: Conf. Ser. — 2014. — Dec. — Vol. 558.
Optimized imaging using non-rigid registration / B. Berkels [et al.] // Ultramicroscopy. — 2014. — Mar. — Vol. 138. — Pp. 46–56.
Digital microscopy from nano to macro, using the SIAMS image-analysis system / R. M. Kadushnikov [et al.] // J. Opt. Technol. — 2011. — Jan. — Vol. 78, no. 1. — P. 61.
View or Download full articleAccess options
SWS access login
Login as SWS Scientific CommitteeLogin as SWS Scientific PartnerLogin as SWS AuthorAuthors and approved SWS contributors will read and export their own linked papers after identity matching by SWS profile, email and SGEM GlobalID.
For librarian assistance: [email protected]
Purchase Instant Access
- Article can be downloaded after successful payment.
- Article may be used according to SWS library access terms.
- Article cannot be redistributed.
