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CONTROL TUNING IN A CLOSED LOOP CAPACITIVE MEMS ACCELEROMETER

Grigorie, Teodor Lucian, Sandu, agos George, Firanescu, Marin, Trusca, Eugen, Grigorie, Otilia

First published: 2014-06-20https://doi.org/10.5593/sgem2014/b61/s24.007View metrics

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Title
CONTROL TUNING IN A CLOSED LOOP CAPACITIVE MEMS ACCELEROMETER
Authors
Grigorie, Teodor Lucian, Sandu, agos George, Firanescu, Marin, Trusca, Eugen, Grigorie, Otilia
Proceedings
SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 14th SGEM GeoConference on NANO, BIO AND GREEN TECHNOLOGIES FOR A SUSTAINABLE FUTURE
Publisher
Stef92 Technology
Year
2014
Pages
Not available yet
ISSN
1314-2704
ISBN
978-619-7105-20-9
Language
en
Publication type
Conference Paper
Keywords
Environmental LegislationMultilateral Relations and Funding Opportunities
References18

  1. Bais, B. & Yeop, B. Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry, Analog Integrated Circuits and Signal Processing, vol. 44, pp. 175–183, 2005

  2. Lungu, R. & Grigorie, T.L. Traductoare Accelerometrice şi Girometrice. Editura SITECH, Craiova, Romania, 2005.

  3. Grigorie, T.L. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 1: Open loop. The IEEE 4nd International Conference on Perspective Technologies and Methods in MEMS Design, Polyana, Ukraine, 21-24 May, pp. 105-114, 2008.

  4. Kraft, M. Closed-loop accelerometer employing oversampling conversion. PhD Thesis, Coventry University, 1997.

  5. Grigorie, T.L. The mathematical modeling and numerical simulation of an open loop analogue capacitive micro-accelerometer. AIAA 12 th St. Petersburg International Conference on Integrated Navigation Systems, St. Petersburg, Russia, 2005.

  6. Negrea, P., Grigorie, T.L., Dinca, L. & Corcau, J. Modeling and numerical simulation of an open-loop miniature capacitive accelerometer for inertial navigation applications, CEAS 2013, Linköping, Sweden, 16-19 September, 2013.

  7. Belea, C. Teoria sistemelor automate. Vol. I. Introducere în teoria sistemelor. Universitatea din Craiova, 1971.

  8. Grigorie, T.L. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 2: Closed loop. The IEEE 4nd International Conference on Perspective Technologies and Methods in MEMS Design, Polyana, Ukraine, 21-24 May, pp. 105-114, 2008.

  9. Kaya, A. & Scheib, T.J. Tuning of PID controls of different structures. Control Engineering, July, 62-65, 1988. 0 0.001 0.002 0.003 0.004 0.005 0.006 0.007 0.008 0.009 0.01 comparative response at a=5g PI-MZ PID-MZ PID-ISE-KS PID-IAE-KS PID-ITAE-KS -20 -15 -10 -5 0 5 10 15 20 -100 -80 -60 -40 -20 static characteristic vr=f(a) for PI-ZN

  10. Bais, B. & Yeop, B. Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry, Analog Integrated Circuits and Signal Processing, vol. 44, pp. 175–183, 2005

  11. Lungu, R. & Grigorie, T.L. Traductoare Accelerometrice şi Girometrice. Editura SITECH, Craiova, Romania, 2005.

  12. Grigorie, T.L. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 1: Open loop. The IEEE 4nd International Conference on Perspective Technologies and Methods in MEMS Design, Polyana, Ukraine, 21-24 May, pp. 105-114, 2008.

  13. Kraft, M. Closed-loop accelerometer employing oversampling conversion. PhD Thesis, Coventry University, 1997.

  14. Grigorie, T.L. The mathematical modeling and numerical simulation of an open loop analogue capacitive micro-accelerometer. AIAA 12 th St. Petersburg International Conference on Integrated Navigation Systems, St. Petersburg, Russia, 2005.

  15. Negrea, P., Grigorie, T.L., Dinca, L. & Corcau, J. Modeling and numerical simulation of an open-loop miniature capacitive accelerometer for inertial navigation applications, CEAS 2013, Linköping, Sweden, 16-19 September, 2013.

  16. Belea, C. Teoria sistemelor automate. Vol. I. Introducere în teoria sistemelor. Universitatea din Craiova, 1971.

  17. Grigorie, T.L. The Matlab/Simulink modeling and numerical simulation of an analogue capacitive micro-accelerometer. Part 2: Closed loop. The IEEE 4nd International Conference on Perspective Technologies and Methods in MEMS Design, Polyana, Ukraine, 21-24 May, pp. 105-114, 2008.

  18. Kaya, A. & Scheib, T.J. Tuning of PID controls of different structures. Control Engineering, July, 62-65, 1988. 0 0.001 0.002 0.003 0.004 0.005 0.006 0.007 0.008 0.009 0.01 comparative response at a=5g PI-MZ PID-MZ PID-ISE-KS PID-IAE-KS PID-ITAE-KS -20 -15 -10 -5 0 5 10 15 20 -100 -80 -60 -40 -20 static characteristic vr=f(a) for PI-ZN

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