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FEATURES OF TOTAL OPTICAL REFLECTION IN SILICON NANOSTRUCTURES OBTAINED BY METAL ASSISTED CHEMICAL ETCHING

Gauhar Assilbayeva

First published: 2017-06-20https://doi.org/10.5593/sgem2017/61/s24.019View metrics

Abstract

Total (specular+diffusive) reflection of nanostructured Si layers prepared by metal assisted chemical etching (MACE) of crystalline silicon (c-Si) wafers is investigated. The thickness of nanostructured Si layers is varied from 0.3 to 100 ?m by increasing the MACE time. The time dependence of silicon nanostructured layers thickness on the etching time was found to be logarithmic. Spectra of the total reflection were measured in optical range from 0.2 to 2 ?m. Depending on the thickness of sample, it was observed a low level of the total reflection near 1% in the ultraviolet (UV)-visible spectral ranges and a strong increase up to 80% in the infrared (IR) optical range above 1 ?m. The low reflection in UV-visible region is explained by partial localization of light in Si nanostructures accompanied with the strong light absorption. The enhanced IR reflection is probably related to the strong scattering of light by silicon nanocrystals in the transparency region. The maximal total reflection in the IR range was found for the layer thickness of about 30 ?m. An effect of doping of Si nanostructures by donor and acceptor impurities on the total reflection in the IR region was observed. The obtained results can be useful to prepare new materials with desired properties for photonic applications.

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Publication details

Title
FEATURES OF TOTAL OPTICAL REFLECTION IN SILICON NANOSTRUCTURES OBTAINED BY METAL ASSISTED CHEMICAL ETCHING
Authors
Gauhar Assilbayeva
Proceedings
SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; 17th International Multidisciplinary Scientific GeoConference SGEM2017, Nano, Bio and Green - Technologies for a Sustainable Future
Publisher
STEF92 Technology
Year
2017
Pages
141-148
SWS Citekey
Mussabek201724141148
ISSN
1314-2704
ISBN
978-619-7408-12-6
Language
en
Publication type
Conference Paper
Keywords
siliconnanostructurestotal reflectionoptics.
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