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MINIATURISED ACCELEROMETERS ARCHITECTURES, DEVELOPMENT TECHNOLOGIES AND APPLICATIONS

Ioana Raluca Edu

First published: 2011-06-20https://doi.org/10.5593/sgem2011/s12.107View metrics

Abstract

The paper deals with the description of actual technologies and trends in the development of miniaturized accelerometers used in inertial naviga tion systems. At the technology levels discussions are made ar ound the micro-electro-mechanical systems (MEMS), nano- electro-mechanical systems (NEMS), micro-opto-electro-mechanical systems (MOEMS), and nano-opto-electro- mechanical systems (NOEMS). Miniature accelerometers use two main methods of de tection: 1) moving or bending under the action of an acceleration plate that plays the role of the seismic mass, followed by a capacitive or piezoelectric de tection, and 2) changing th e frequency of a vibrating element according to its tension, influenced by the loading of the seismic mass under the action of the acceleration sensor. The met hods shown have resulted in five different miniature accelerometers impor tant architectures: the pendulum, the lateral movement of the seismic mass, the resonant, with electron tunneling and with electrostatic suspension. Finally are discussed the actu al and the future applications of the accelerometers, developed using different technologies. Th e precision classes considered for the applications are: very -precise navigations, long-range guidance, navigators with 1nm/hr, tactical weapons and commercial consumer applications.

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Publication details

Title
MINIATURISED ACCELEROMETERS ARCHITECTURES, DEVELOPMENT TECHNOLOGIES AND APPLICATIONS
Authors
Ioana Raluca Edu
Proceedings
SGEM International Multidisciplinary Scientific GeoConference EXPO Proceedings; SGEM2011 11th International Multidisciplinary Scientific GeoConference
Publisher
Stef92 Technology
Year
2011
Pages
Not available yet
ISSN
1314-2704
ISBN
Not available yet
Language
en
Publication type
Conference Paper
Keywords
Nano and micro accelerometersdesign architecturesinertial navigation
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