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Based on a previous research, a thermal bimorph actuator was used for a development of a micromirror element. An existing technological process for the manufacturing of IC was used as base for micromirror. An analysis of the available construction materials was made, on the basis of which a choice was made for silicon as the main material for the micromirror, aluminum as the reflective coating and the first element of the bimorph beam, and silicon dioxide as the second element of the bimorph beam. ? polysilicon he...