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The MEMS technology has experienced an amazing growth since the mid-20th century, becoming a major presence in current technologies. The MEMS devices refers to microstructures that are based on both electrical and mechanical components. Given their multiple applicability, made the demand on market to increase, resulting the rapid development of this technology. With a wide opening in the field of navigation, MEMS devices are based on accelerometers and gyros, but also on sensors such as magnetometers, environmenta...

By definition, the monitoring of the in situ behavior of the constructions includes the follow-up and evaluation of their technical and functional state and the interventions on them in order to remedy the behavioral deficiencies found. The knowledge of the causal and conditional laws of appearance and development of the behavioral phenomena of the constructions allowed and allows the definition of some behavioral properties. These properties can be defined qualitatively, by attributes, or quantitatively, by sizes...