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The possibility of manufacturing compact accelerometer based on prefabricated elements has been shown. Since most of the sensitive element designs at the lowest cost possible to produce at different ranges of sensitivity, so accelerometer design will be flexible in terms of wide range measuring of linear accelerations. Paper describes an original method of calibrating an autonomous unit of accelerometers. Without the use of precision rotary tables, centrifuges, and independent of the vibration reason, it is possib...

Based on a previous research, a thermal bimorph actuator was used for a development of a micromirror element. An existing technological process for the manufacturing of IC was used as base for micromirror. An analysis of the available construction materials was made, on the basis of which a choice was made for silicon as the main material for the micromirror, aluminum as the reflective coating and the first element of the bimorph beam, and silicon dioxide as the second element of the bimorph beam. ? polysilicon he...