Publication
CLOSED-LOOP CONTROLLED ARCHITECTURE OF A MEMS CAPACITIVE ACCELEROMETER WITH EXCITATION BASED ON A HIGH FREQUENCY SQUARE-WAVE VOLTAGE SIGNAL, USED IN INERTIAL NAVIGATION APPLICATIONS
(STEF92 Technology, 2020-09-20, Teodor Lucian Grigorie, Irinel Constantin Gresita, Otilia Grigorie)
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The MEMS technology has experienced an amazing growth since the mid-20th century, becoming a major presence in current technologies. The MEMS devices refers to microstructures that are based on both electrical and mechanical components. Given their multiple applicability, made the demand on market to increase, resulting the rapid development of this technology. With a wide opening in the field of navigation, MEMS devices are based on accelerometers and gyros, but also on sensors such as magnetometers, environmenta...
Geodesy and Mine Surveying2020